Microfabrication Technologies for Interaction Circuits of THz Vacuum Electronic Devices
Advances in manufacturing technology are allowing for the realization of interaction circuit with microstructures. The capability to produce small circuit structures is allowing new opportunities for vacuum electronic devices producing terahertz (THz) frequency radiation, which is impractical with t...
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-11-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/15/11/1357 |
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| _version_ | 1850068602690994176 |
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| author | Xinghui Li Jinjun Feng |
| author_facet | Xinghui Li Jinjun Feng |
| author_sort | Xinghui Li |
| collection | DOAJ |
| description | Advances in manufacturing technology are allowing for the realization of interaction circuit with microstructures. The capability to produce small circuit structures is allowing new opportunities for vacuum electronic devices producing terahertz (THz) frequency radiation, which is impractical with traditional machining technology. This publication reviews recent progress on advanced microfabrication technologies applicable to interaction circuits of THz vacuum electronic devices, including LIGA/UV-LIGA (Ultraviolet Lithographic, Galvonoformung and Abformung), deep reactive ion etching (DRIE), micro/nano computer numerical control (CNC) milling, three-dimension (3D) printing, etc., and describes the current State-of-the-Art of their applications. |
| format | Article |
| id | doaj-art-2636dc97183c436d9adfc6d4ef8d0c2d |
| institution | DOAJ |
| issn | 2072-666X |
| language | English |
| publishDate | 2024-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-2636dc97183c436d9adfc6d4ef8d0c2d2025-08-20T02:48:01ZengMDPI AGMicromachines2072-666X2024-11-011511135710.3390/mi15111357Microfabrication Technologies for Interaction Circuits of THz Vacuum Electronic DevicesXinghui Li0Jinjun Feng1National Key Laboratory of Science and Technology on Vacuum Electronics, Beijing Vacuum Electronics Research Institute, Beijing 100015, ChinaNational Key Laboratory of Science and Technology on Vacuum Electronics, Beijing Vacuum Electronics Research Institute, Beijing 100015, ChinaAdvances in manufacturing technology are allowing for the realization of interaction circuit with microstructures. The capability to produce small circuit structures is allowing new opportunities for vacuum electronic devices producing terahertz (THz) frequency radiation, which is impractical with traditional machining technology. This publication reviews recent progress on advanced microfabrication technologies applicable to interaction circuits of THz vacuum electronic devices, including LIGA/UV-LIGA (Ultraviolet Lithographic, Galvonoformung and Abformung), deep reactive ion etching (DRIE), micro/nano computer numerical control (CNC) milling, three-dimension (3D) printing, etc., and describes the current State-of-the-Art of their applications.https://www.mdpi.com/2072-666X/15/11/1357THzvacuum electronics deviceinteraction circuitFWGmicrofabricationLIGA/UV-LIGA |
| spellingShingle | Xinghui Li Jinjun Feng Microfabrication Technologies for Interaction Circuits of THz Vacuum Electronic Devices Micromachines THz vacuum electronics device interaction circuit FWG microfabrication LIGA/UV-LIGA |
| title | Microfabrication Technologies for Interaction Circuits of THz Vacuum Electronic Devices |
| title_full | Microfabrication Technologies for Interaction Circuits of THz Vacuum Electronic Devices |
| title_fullStr | Microfabrication Technologies for Interaction Circuits of THz Vacuum Electronic Devices |
| title_full_unstemmed | Microfabrication Technologies for Interaction Circuits of THz Vacuum Electronic Devices |
| title_short | Microfabrication Technologies for Interaction Circuits of THz Vacuum Electronic Devices |
| title_sort | microfabrication technologies for interaction circuits of thz vacuum electronic devices |
| topic | THz vacuum electronics device interaction circuit FWG microfabrication LIGA/UV-LIGA |
| url | https://www.mdpi.com/2072-666X/15/11/1357 |
| work_keys_str_mv | AT xinghuili microfabricationtechnologiesforinteractioncircuitsofthzvacuumelectronicdevices AT jinjunfeng microfabricationtechnologiesforinteractioncircuitsofthzvacuumelectronicdevices |