A MEMS Pirani Vacuum Gauge Based on Porous Silicon
Vacuum gauges based on Micro-Electro-Mechanical System (MEMS) technology have the advantages of small size, high reliability, and low cost, so they are widely used in semiconductor, chemical, laboratory, and aerospace. In this paper, a high-reliability MEMS Pirani vacuum gauge based on a porous sili...
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MDPI AG
2025-02-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/16/3/296 |
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| author | Yuzhe Lin Zichao Zhang Jifang Tao Lianggong Wen |
| author_facet | Yuzhe Lin Zichao Zhang Jifang Tao Lianggong Wen |
| author_sort | Yuzhe Lin |
| collection | DOAJ |
| description | Vacuum gauges based on Micro-Electro-Mechanical System (MEMS) technology have the advantages of small size, high reliability, and low cost, so they are widely used in semiconductor, chemical, laboratory, and aerospace. In this paper, a high-reliability MEMS Pirani vacuum gauge based on a porous silicon platform is designed, fabricated, and characterized. The repeatability within 4~10<sup>5</sup> Pa has been tested. The porous silicon acting as a support material achieved a porosity of 68% and a thermal conductivity of 3.5 W/(m·K), and the surface morphology of the porous silicon is smooth. The proposed MEMS Pirani vacuum gauge containing no suspended thin-film structures has good mechanical stability and is unaffected by mechanical shock and vibration in operation. |
| format | Article |
| id | doaj-art-2507ee4918d749bea93bb53054954ff2 |
| institution | Kabale University |
| issn | 2072-666X |
| language | English |
| publishDate | 2025-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-2507ee4918d749bea93bb53054954ff22025-08-20T03:43:22ZengMDPI AGMicromachines2072-666X2025-02-0116329610.3390/mi16030296A MEMS Pirani Vacuum Gauge Based on Porous SiliconYuzhe Lin0Zichao Zhang1Jifang Tao2Lianggong Wen3School of Information Science and Engineering, Shandong University, Qingdao 266237, ChinaSchool of Information Science and Engineering, Shandong University, Qingdao 266237, ChinaSchool of Information Science and Engineering, Shandong University, Qingdao 266237, ChinaShenzhen Institute of Beihang University, Shenzhen 518057, ChinaVacuum gauges based on Micro-Electro-Mechanical System (MEMS) technology have the advantages of small size, high reliability, and low cost, so they are widely used in semiconductor, chemical, laboratory, and aerospace. In this paper, a high-reliability MEMS Pirani vacuum gauge based on a porous silicon platform is designed, fabricated, and characterized. The repeatability within 4~10<sup>5</sup> Pa has been tested. The porous silicon acting as a support material achieved a porosity of 68% and a thermal conductivity of 3.5 W/(m·K), and the surface morphology of the porous silicon is smooth. The proposed MEMS Pirani vacuum gauge containing no suspended thin-film structures has good mechanical stability and is unaffected by mechanical shock and vibration in operation.https://www.mdpi.com/2072-666X/16/3/296Micro-Electro-Mechanical SystemPirani vacuum gaugeporous siliconMEMS vacuum gauge |
| spellingShingle | Yuzhe Lin Zichao Zhang Jifang Tao Lianggong Wen A MEMS Pirani Vacuum Gauge Based on Porous Silicon Micromachines Micro-Electro-Mechanical System Pirani vacuum gauge porous silicon MEMS vacuum gauge |
| title | A MEMS Pirani Vacuum Gauge Based on Porous Silicon |
| title_full | A MEMS Pirani Vacuum Gauge Based on Porous Silicon |
| title_fullStr | A MEMS Pirani Vacuum Gauge Based on Porous Silicon |
| title_full_unstemmed | A MEMS Pirani Vacuum Gauge Based on Porous Silicon |
| title_short | A MEMS Pirani Vacuum Gauge Based on Porous Silicon |
| title_sort | mems pirani vacuum gauge based on porous silicon |
| topic | Micro-Electro-Mechanical System Pirani vacuum gauge porous silicon MEMS vacuum gauge |
| url | https://www.mdpi.com/2072-666X/16/3/296 |
| work_keys_str_mv | AT yuzhelin amemspiranivacuumgaugebasedonporoussilicon AT zichaozhang amemspiranivacuumgaugebasedonporoussilicon AT jifangtao amemspiranivacuumgaugebasedonporoussilicon AT lianggongwen amemspiranivacuumgaugebasedonporoussilicon AT yuzhelin memspiranivacuumgaugebasedonporoussilicon AT zichaozhang memspiranivacuumgaugebasedonporoussilicon AT jifangtao memspiranivacuumgaugebasedonporoussilicon AT lianggongwen memspiranivacuumgaugebasedonporoussilicon |