A Pathway for the Integration of Novel Ferroelectric Thin Films on Non-Planar Photonic Integrated Circuits

A Pathway for the Integration of Novel Ferroelectric Thin Films on Non-Planar Photonic Integrated Circuits

The heterogeneous integration of ferroelectric thin films on silicon- or silicon nitride-based platforms for photonic integrated circuits plays a crucial role in the development of nanophotonic thin film modulators. For this purpose, an ultrathin seed film was recently introduced as an integration m...

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Bibliographic Details
Main Authors: Enes Lievens, Kobe De Geest, Ewout Picavet, Liesbet Van Landschoot, Henk Vrielinck, Gilles Freddy Feutmba, Hannes Rijckaert, Klaartje De Buysser, Dries Van Thourhout, Peter Bienstman, Jeroen Beeckman
Format: Article
Language:English
Published: MDPI AG 2025-03-01
Series:Micromachines
Subjects:
hydrogen silsesquioxane
planarization
ferroelectric thin films
heterogeneous integration
chemical solution deposition
Pockels modulator
Online Access:https://www.mdpi.com/2072-666X/16/3/334
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