Optimizing the morphology transition on MOVPE-grown (100) β-Ga2O3 film between step-flow growth and step-bunching: A machine learning-assisted approach
The step-bunching instability in (100) β-Ga2O3 films grown via metalorganic vapor phase epitaxy was investigated using a machine learning approach based on Random Forest (RF). This study reveals the interplay of Ga supersaturation (O2/Ga) and impurity effects as coexisting mechanisms driving the mor...
Saved in:
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-05-01
|
| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/5.0261944 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|