Pulsed Temperature Operation of SnO<sub>2</sub>-Based Gas Sensors

Pulsed Temperature Operation of SnO<sub>2</sub>-Based Gas Sensors

We herein demonstrate the pulsed-mode temperature operation of chemical sensor devices based on thin SnO<sub>2</sub> films, which were synthesized by magnetron sputtering. The gas-sensitive films were integrated on SiN-based micro-hotplate (µhp) chips, which enable operation temperatures...

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Bibliographic Details
Main Authors:	Larissa Egger, Lisbeth Reiner, Alessandro Togni, Christian Mitterer, Anton Köck
Format:	Article
Language:	English
Published:	MDPI AG 2024-05-01
Series:	Proceedings
Subjects:	chemical sensors metal oxides nanoparticles temperature modulation
Online Access:	https://www.mdpi.com/2504-3900/97/1/211
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