Green scheduling of dual-armed cluster tool based on cleaning scenarios
Semiconductor manufacturing is one of the most complex manufacturing systems, of which wafer fabrication is the core part. Dual-armed cluster tool is widely used in the wafer manufacturing industry with its efficient production characteristics. The scheduling process of the dual-armed cluster tool h...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2022-07-01
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| Series: | Cleaner Logistics and Supply Chain |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2772390922000208 |
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