Advancements in MEMS Micromirror and Microshutter Arrays for Light Transmission Through a Substrate

Advancements in MEMS Micromirror and Microshutter Arrays for Light Transmission Through a Substrate

This paper reviews and compares electrostatically actuated MEMS (micro-electro-mechanical system) arrays for light modulation and light steering in which transmission through the substrate is required. A comprehensive comparison of the technical achievements of micromirror arrays and microshutter ar...

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Bibliographic Details
Main Authors: Shilby Baby, Mustaqim Siddi Que Iskhandar, Md Kamrul Hasan, Steffen Liebermann, Jiahao Chen, Hasnain Qasim, Shujie Liu, Eslam Farrag, Dennis Löber, Naureen Ahmed, Guilin Xu, Hartmut Hillmer
Format: Article
Language:English
Published: MDPI AG 2025-01-01
Series:Micromachines
Subjects:
micromirror arrays
light steering
smart window
planarization
closing time
energy saving
Online Access:https://www.mdpi.com/2072-666X/16/1/103
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