Micro Linear Ultrasonic Motor With a Hall Sensor-Based Feedback Control System
We propose a one-millimeter-scale linear ultrasonic motor and its feedback control system with a Hall sensor. The size of the stator measures 1.6 mm in height, 1.6 mm in width, and 0.3 mm in thickness, and there is a hole with a diameter of 0.6 mm at the center, which is one of the smallest linear m...
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IEEE
2024-01-01
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| Series: | IEEE Access |
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| Online Access: | https://ieeexplore.ieee.org/document/10664586/ |
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| author | Shunsuke Izuhara Tomoaki Mashimo |
| author_facet | Shunsuke Izuhara Tomoaki Mashimo |
| author_sort | Shunsuke Izuhara |
| collection | DOAJ |
| description | We propose a one-millimeter-scale linear ultrasonic motor and its feedback control system with a Hall sensor. The size of the stator measures 1.6 mm in height, 1.6 mm in width, and 0.3 mm in thickness, and there is a hole with a diameter of 0.6 mm at the center, which is one of the smallest linear motors reported to date. A similar-sized Hall sensor detects the displacement of the slider inserted into the stator hole for position control. In this paper, we build the prototype motor and evaluate its basic performance measures, such as electrical impedance characteristics and mechanical output characteristics. The optimization of the preload between the stator and slider has improved the thrust force of the motor to the maximum value of 7.6 mN, resulting in a higher force-to-volume ratio than existing miniature linear motors. We combine the motor with a Hall sensor having a similar scale to the motor and construct a feedback system with a burst-wave control. The feedback control succeeded in removing the steady-state error that remains in the open-loop system. |
| format | Article |
| id | doaj-art-1b51537d0e244ef385f9320295abd3a0 |
| institution | OA Journals |
| issn | 2169-3536 |
| language | English |
| publishDate | 2024-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Access |
| spelling | doaj-art-1b51537d0e244ef385f9320295abd3a02025-08-20T01:54:57ZengIEEEIEEE Access2169-35362024-01-011213165613166310.1109/ACCESS.2024.345429510664586Micro Linear Ultrasonic Motor With a Hall Sensor-Based Feedback Control SystemShunsuke Izuhara0https://orcid.org/0000-0003-0492-4991Tomoaki Mashimo1https://orcid.org/0000-0003-4294-9209Department of Mechanical and Electrical Systems Engineering, Kyoto University of Advanced Science, Kyoto, JapanGraduate School of Natural Science and Technology, Okayama University, Okayama, JapanWe propose a one-millimeter-scale linear ultrasonic motor and its feedback control system with a Hall sensor. The size of the stator measures 1.6 mm in height, 1.6 mm in width, and 0.3 mm in thickness, and there is a hole with a diameter of 0.6 mm at the center, which is one of the smallest linear motors reported to date. A similar-sized Hall sensor detects the displacement of the slider inserted into the stator hole for position control. In this paper, we build the prototype motor and evaluate its basic performance measures, such as electrical impedance characteristics and mechanical output characteristics. The optimization of the preload between the stator and slider has improved the thrust force of the motor to the maximum value of 7.6 mN, resulting in a higher force-to-volume ratio than existing miniature linear motors. We combine the motor with a Hall sensor having a similar scale to the motor and construct a feedback system with a burst-wave control. The feedback control succeeded in removing the steady-state error that remains in the open-loop system.https://ieeexplore.ieee.org/document/10664586/Ferroelectric materialsmicroactuatorspiezoelectric actuators |
| spellingShingle | Shunsuke Izuhara Tomoaki Mashimo Micro Linear Ultrasonic Motor With a Hall Sensor-Based Feedback Control System IEEE Access Ferroelectric materials microactuators piezoelectric actuators |
| title | Micro Linear Ultrasonic Motor With a Hall Sensor-Based Feedback Control System |
| title_full | Micro Linear Ultrasonic Motor With a Hall Sensor-Based Feedback Control System |
| title_fullStr | Micro Linear Ultrasonic Motor With a Hall Sensor-Based Feedback Control System |
| title_full_unstemmed | Micro Linear Ultrasonic Motor With a Hall Sensor-Based Feedback Control System |
| title_short | Micro Linear Ultrasonic Motor With a Hall Sensor-Based Feedback Control System |
| title_sort | micro linear ultrasonic motor with a hall sensor based feedback control system |
| topic | Ferroelectric materials microactuators piezoelectric actuators |
| url | https://ieeexplore.ieee.org/document/10664586/ |
| work_keys_str_mv | AT shunsukeizuhara microlinearultrasonicmotorwithahallsensorbasedfeedbackcontrolsystem AT tomoakimashimo microlinearultrasonicmotorwithahallsensorbasedfeedbackcontrolsystem |