On the Implementation of a Micromachining Compatible MOEMS Tri-Axial Accelerometer
On-chip optical accelerometers can be a promising alternative to capacitive, piezo-resistive, and piezo-electric accelerometers in some applications due to their immunity to electromagnetic interference and high sensitivity, which allow for robust operation in electromagnetically noisy environments....
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-06-01
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| Series: | Chips |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2674-0729/4/2/28 |
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