On the Implementation of a Micromachining Compatible MOEMS Tri-Axial Accelerometer
On-chip optical accelerometers can be a promising alternative to capacitive, piezo-resistive, and piezo-electric accelerometers in some applications due to their immunity to electromagnetic interference and high sensitivity, which allow for robust operation in electromagnetically noisy environments....
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| Format: | Article |
| Language: | English |
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MDPI AG
2025-06-01
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| Series: | Chips |
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| Online Access: | https://www.mdpi.com/2674-0729/4/2/28 |
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| author | Ahmed Hamouda Elsayed Samir Abozyd Abdelrahman Toraya Mohamed Abdelsalam Mansour Noha Gaber |
| author_facet | Ahmed Hamouda Elsayed Samir Abozyd Abdelrahman Toraya Mohamed Abdelsalam Mansour Noha Gaber |
| author_sort | Ahmed Hamouda Elsayed |
| collection | DOAJ |
| description | On-chip optical accelerometers can be a promising alternative to capacitive, piezo-resistive, and piezo-electric accelerometers in some applications due to their immunity to electromagnetic interference and high sensitivity, which allow for robust operation in electromagnetically noisy environments. This paper focuses on the characterization of an easy-to-fabricate tri-axial fiber-free optical MEMS accelerometer, which employs a simple assembly consisting of a light emitting diode (LED), a quadrant photodetector (QPD), and a suspended proof mass, measuring acceleration through light power modulation. This configuration enables simple readout circuitry without the need for complex digital signal processing (DSP). Performance modeling was conducted to simulate the LED’s irradiance profile and its interaction with the proof mass and QPD. Additionally, experimental tests were performed to measure the device’s mechanical sensitivity and validate the mechanical model. Lateral mechanical sensitivity is obtained with acceptable discrepancy from that obtained from FEA simulations. This work consolidates the performance of the design adapted and demonstrates the accelerometer’s feasibility for practical applications. |
| format | Article |
| id | doaj-art-1b49127522eb41b89de478f0f9bb9e1b |
| institution | Kabale University |
| issn | 2674-0729 |
| language | English |
| publishDate | 2025-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Chips |
| spelling | doaj-art-1b49127522eb41b89de478f0f9bb9e1b2025-08-20T03:26:55ZengMDPI AGChips2674-07292025-06-01422810.3390/chips4020028On the Implementation of a Micromachining Compatible MOEMS Tri-Axial AccelerometerAhmed Hamouda Elsayed0Samir Abozyd1Abdelrahman Toraya2Mohamed Abdelsalam Mansour3Noha Gaber4Center for Nanotechnology, Zewail City of Science and Technology, Giza 12578, EgyptCenter for Nanotechnology, Zewail City of Science and Technology, Giza 12578, EgyptCenter for Nanotechnology, Zewail City of Science and Technology, Giza 12578, EgyptCenter for Nanotechnology, Zewail City of Science and Technology, Giza 12578, EgyptCenter for Nanotechnology, Zewail City of Science and Technology, Giza 12578, EgyptOn-chip optical accelerometers can be a promising alternative to capacitive, piezo-resistive, and piezo-electric accelerometers in some applications due to their immunity to electromagnetic interference and high sensitivity, which allow for robust operation in electromagnetically noisy environments. This paper focuses on the characterization of an easy-to-fabricate tri-axial fiber-free optical MEMS accelerometer, which employs a simple assembly consisting of a light emitting diode (LED), a quadrant photodetector (QPD), and a suspended proof mass, measuring acceleration through light power modulation. This configuration enables simple readout circuitry without the need for complex digital signal processing (DSP). Performance modeling was conducted to simulate the LED’s irradiance profile and its interaction with the proof mass and QPD. Additionally, experimental tests were performed to measure the device’s mechanical sensitivity and validate the mechanical model. Lateral mechanical sensitivity is obtained with acceptable discrepancy from that obtained from FEA simulations. This work consolidates the performance of the design adapted and demonstrates the accelerometer’s feasibility for practical applications.https://www.mdpi.com/2674-0729/4/2/28MOEMSmicromachininginertial sensingaccelerometer |
| spellingShingle | Ahmed Hamouda Elsayed Samir Abozyd Abdelrahman Toraya Mohamed Abdelsalam Mansour Noha Gaber On the Implementation of a Micromachining Compatible MOEMS Tri-Axial Accelerometer Chips MOEMS micromachining inertial sensing accelerometer |
| title | On the Implementation of a Micromachining Compatible MOEMS Tri-Axial Accelerometer |
| title_full | On the Implementation of a Micromachining Compatible MOEMS Tri-Axial Accelerometer |
| title_fullStr | On the Implementation of a Micromachining Compatible MOEMS Tri-Axial Accelerometer |
| title_full_unstemmed | On the Implementation of a Micromachining Compatible MOEMS Tri-Axial Accelerometer |
| title_short | On the Implementation of a Micromachining Compatible MOEMS Tri-Axial Accelerometer |
| title_sort | on the implementation of a micromachining compatible moems tri axial accelerometer |
| topic | MOEMS micromachining inertial sensing accelerometer |
| url | https://www.mdpi.com/2674-0729/4/2/28 |
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