Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes

Properties of RF-Sputtered PZT Thin Films with Ti/Pt Electrodes

Effect of annealing temperature and thin film thickness on properties of Pb(Zr0.53Ti0.47)O3 (PZT) thin film deposited via radiofrequency magnetron sputtering technique onto Pt/Ti/SiO2/Si substrate was investigated. Average grain sizes of the PZT thin film were measured by atomic force microscope; th...

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Bibliographic Details
Main Authors: Cui Yan, Yao Minglei, Zhang Qunying, Chen Xiaolong, Chu Jinkui, Guan Le
Format: Article
Language:English
Published: Wiley 2014-01-01
Series:International Journal of Polymer Science
Online Access:http://dx.doi.org/10.1155/2014/574684
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