Vibration cancellation controller design of magnetic levitation stage for fast and precise positioning
High-speed and high-precision positioning technology is widely used in industrial machinery such as manufacturing equipment and processing machines. In semiconductor manufacturing equipment, a magnetic levitation (maglev) stage is used to prevent the effects of non-linear friction, which deteriorate...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2025-06-01
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| Series: | Mechanical Engineering Journal |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/mej/12/4/12_25-00114/_pdf/-char/en |
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