Identification and trimming of the unbalanced mass in micro hemispherical resonators based on an elastic electrode substrate
Abstract This study presents a scheme for the identification and trimming of the first three harmonics of mass defects in micro hemispherical resonators (MHRs), aiming to refine their mass balancing techniques. Given the manufacturing and structural uniqueness of MHRs, a multimodal elastic electrode...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-04-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00932-4 |
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