Impermeable and Elastic Polydimethylsiloxane Film by Parylene‐Caulking for Inflatable Soft Devices
Abstract Moldable polymers, such as polydimethylsiloxane (PDMS), are widely used for microstructures. Various PDMS microstructures have been developed by molding and applied to microfluidic devices. In addition to the moldability of PDMS, its elasticity, optical transparency, gas permeability, and b...
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| Format: | Article |
| Language: | English |
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Wiley-VCH
2025-04-01
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| Series: | Advanced Materials Interfaces |
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| Online Access: | https://doi.org/10.1002/admi.202400629 |
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| author | Satoshi Konishi Seiji Suzuki Fumiya Sano Yuto Hori Tatsumi Katsura Fumiyoshi Dogoshi |
| author_facet | Satoshi Konishi Seiji Suzuki Fumiya Sano Yuto Hori Tatsumi Katsura Fumiyoshi Dogoshi |
| author_sort | Satoshi Konishi |
| collection | DOAJ |
| description | Abstract Moldable polymers, such as polydimethylsiloxane (PDMS), are widely used for microstructures. Various PDMS microstructures have been developed by molding and applied to microfluidic devices. In addition to the moldability of PDMS, its elasticity, optical transparency, gas permeability, and biocompatibility facilitate its utilization in diverse applications. However, the permeability of PDMS makes it unsuitable in cases that require sealing. For instance, inflatable soft devices, including pneumatic balloon actuators, require their constituent material to exhibit both elastic and impermeable features to utilize driving pressure effectively. In this context, this paper presents the poly‐para‐xylylene (parylene)‐caulking of PDMS without losing elasticity of PDMS. Parylene‐caulked PDMS is obtained by etching coated parylene on PDMS. In the context of the previous study on parylene‐caulked PDMS and similar works published recently, updated surface analysis results, and prepolymer ratio dependences are reported in this paper. Surface analysis is performed based on Fourier transform infrared spectrometry and time‐of‐flight secondary ion mass spectrometry is used to examine the presence of parylene on and inside the PDMS superficial layer. Parylene‐caulked PDMS is attractive for inflatable soft actuators. This study believes that these results will potentially contribute to a wide range of applications that require gas impermeability. |
| format | Article |
| id | doaj-art-179c8a364da24ba8878d74f39e1c07fc |
| institution | OA Journals |
| issn | 2196-7350 |
| language | English |
| publishDate | 2025-04-01 |
| publisher | Wiley-VCH |
| record_format | Article |
| series | Advanced Materials Interfaces |
| spelling | doaj-art-179c8a364da24ba8878d74f39e1c07fc2025-08-20T02:07:58ZengWiley-VCHAdvanced Materials Interfaces2196-73502025-04-01127n/an/a10.1002/admi.202400629Impermeable and Elastic Polydimethylsiloxane Film by Parylene‐Caulking for Inflatable Soft DevicesSatoshi Konishi0Seiji Suzuki1Fumiya Sano2Yuto Hori3Tatsumi Katsura4Fumiyoshi Dogoshi5Department of Mechanical Engineering Ritsumeikan University Noji‐higashi 1‐1‐1 Kusatsu Shiga 525‐8577 JapanGraduate Course of Science and Engineering Ritsumeikan University Kusatsu 525‐8577 JapanGraduate Course of Science and Engineering Ritsumeikan University Kusatsu 525‐8577 JapanGraduate Course of Science and Engineering Ritsumeikan University Kusatsu 525‐8577 JapanGraduate Course of Science and Engineering Ritsumeikan University Kusatsu 525‐8577 JapanDepartment of Mechanical Engineering Ritsumeikan University Noji‐higashi 1‐1‐1 Kusatsu Shiga 525‐8577 JapanAbstract Moldable polymers, such as polydimethylsiloxane (PDMS), are widely used for microstructures. Various PDMS microstructures have been developed by molding and applied to microfluidic devices. In addition to the moldability of PDMS, its elasticity, optical transparency, gas permeability, and biocompatibility facilitate its utilization in diverse applications. However, the permeability of PDMS makes it unsuitable in cases that require sealing. For instance, inflatable soft devices, including pneumatic balloon actuators, require their constituent material to exhibit both elastic and impermeable features to utilize driving pressure effectively. In this context, this paper presents the poly‐para‐xylylene (parylene)‐caulking of PDMS without losing elasticity of PDMS. Parylene‐caulked PDMS is obtained by etching coated parylene on PDMS. In the context of the previous study on parylene‐caulked PDMS and similar works published recently, updated surface analysis results, and prepolymer ratio dependences are reported in this paper. Surface analysis is performed based on Fourier transform infrared spectrometry and time‐of‐flight secondary ion mass spectrometry is used to examine the presence of parylene on and inside the PDMS superficial layer. Parylene‐caulked PDMS is attractive for inflatable soft actuators. This study believes that these results will potentially contribute to a wide range of applications that require gas impermeability.https://doi.org/10.1002/admi.202400629elasticityimpermeabilityinflatable soft actuatorparylene‐caulkingpolydimethylsiloxane |
| spellingShingle | Satoshi Konishi Seiji Suzuki Fumiya Sano Yuto Hori Tatsumi Katsura Fumiyoshi Dogoshi Impermeable and Elastic Polydimethylsiloxane Film by Parylene‐Caulking for Inflatable Soft Devices Advanced Materials Interfaces elasticity impermeability inflatable soft actuator parylene‐caulking polydimethylsiloxane |
| title | Impermeable and Elastic Polydimethylsiloxane Film by Parylene‐Caulking for Inflatable Soft Devices |
| title_full | Impermeable and Elastic Polydimethylsiloxane Film by Parylene‐Caulking for Inflatable Soft Devices |
| title_fullStr | Impermeable and Elastic Polydimethylsiloxane Film by Parylene‐Caulking for Inflatable Soft Devices |
| title_full_unstemmed | Impermeable and Elastic Polydimethylsiloxane Film by Parylene‐Caulking for Inflatable Soft Devices |
| title_short | Impermeable and Elastic Polydimethylsiloxane Film by Parylene‐Caulking for Inflatable Soft Devices |
| title_sort | impermeable and elastic polydimethylsiloxane film by parylene caulking for inflatable soft devices |
| topic | elasticity impermeability inflatable soft actuator parylene‐caulking polydimethylsiloxane |
| url | https://doi.org/10.1002/admi.202400629 |
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