The effect of hydrogen ion bombardment on the capping layers of extreme ultraviolet mirrors
Extreme ultraviolet (EUV) mirrors demand exceptionally high reflectivity, but contamination from carbon, tin, oxide layers, and etching debris during use can degrade their performance and reduce production yields. Hydrogen ion bombardment is commonly employed for surface cleaning; however, prolonged...
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2025-01-01
|
| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/adca00 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|