Micromachining Error Tolerance Analysis in EEG Sensing Nanostructure Arrays: Control of Fano Resonance for Enhanced Performance
The silicon-based electroencephalography (EEG) sensing technology encounters performance limitations due to spectral distortions caused by micromachining, which significantly degrade its effectiveness in Brain-Computer Interface (BCI) systems. To enhance the performance of EEG sensors, this study sy...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/11030254/ |
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