Effect of higher driving frequencies in dual-frequency discharge on plasma generation in capacitive coupled plasmas: PIC-MCC simulation
We investigated the electron heating mechanism in dual-frequency discharge (DFD) with higher driving frequencies fH = 27.12 MHz (=2 fL) to 108.48 MHz (=8 fL) and fL = 13.56 MHz, focusing on electric field fluctuations and comparing the results with single-frequency discharge (SFD). In a typical DFD,...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0256430 |
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