APA (7th ed.) Citation

Otomo, H., Lai, J., Kamataki, K., Yamamoto, Y., & Shiratani, M. Effect of higher driving frequencies in dual-frequency discharge on plasma generation in capacitive coupled plasmas: PIC-MCC simulation. AIP Publishing LLC.

Chicago Style (17th ed.) Citation

Otomo, Hiroshi, Jian-Syun Lai, Kunihiro Kamataki, Yuma Yamamoto, and Masaharu Shiratani. Effect of Higher Driving Frequencies in Dual-frequency Discharge on Plasma Generation in Capacitive Coupled Plasmas: PIC-MCC Simulation. AIP Publishing LLC.

MLA (9th ed.) Citation

Otomo, Hiroshi, et al. Effect of Higher Driving Frequencies in Dual-frequency Discharge on Plasma Generation in Capacitive Coupled Plasmas: PIC-MCC Simulation. AIP Publishing LLC.