Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium Substrate

Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium Substrate

Titanium carbide was synthetized by sputtering graphite target on heated titanium substrate by magnetron sputtering process. The obtained samples were characterized by X-ray diffraction (XRD) analysis and Raman spectroscopy, the elemental analysis was made by Energy-dispersive X-ray spectroscopy (ED...

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Bibliographic Details
Main Authors: O.E.В Kaipoldayev, A.D.В Muradov, Y.S.В Mukhametkarimov, R.R.В Nemkayeva, G.A.В Baigarinova, M.B.В Aitzhanov, N.R.В Guseinov
Format: Article
Language:English
Published: Sumy State University 2017-10-01
Series:Журнал нано- та електронної фізики
Subjects:
Titanium carbide
Magnetron sputtering
Raman spectroscopy
Transition-metal carbid
Online Access:http://jnep.sumdu.edu.ua:8080/download/numbers/2017/5/articles/Proof_JNEP_05045.pdf
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