Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium Substrate

Titanium carbide was synthetized by sputtering graphite target on heated titanium substrate by magnetron sputtering process. The obtained samples were characterized by X-ray diffraction (XRD) analysis and Raman spectroscopy, the elemental analysis was made by Energy-dispersive X-ray spectroscopy (ED...

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Main Authors: O.E.В Kaipoldayev, A.D.В Muradov, Y.S.В Mukhametkarimov, R.R.В Nemkayeva, G.A.В Baigarinova, M.B.В Aitzhanov, N.R.В Guseinov
Format: Article
Language:English
Published: Sumy State University 2017-10-01
Series:Журнал нано- та електронної фізики
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Online Access:http://jnep.sumdu.edu.ua:8080/download/numbers/2017/5/articles/Proof_JNEP_05045.pdf
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author O.E.В Kaipoldayev
A.D.В Muradov
Y.S.В Mukhametkarimov
R.R.В Nemkayeva
G.A.В Baigarinova
M.B.В Aitzhanov
N.R.В Guseinov
author_facet O.E.В Kaipoldayev
A.D.В Muradov
Y.S.В Mukhametkarimov
R.R.В Nemkayeva
G.A.В Baigarinova
M.B.В Aitzhanov
N.R.В Guseinov
author_sort O.E.В Kaipoldayev
collection DOAJ
description Titanium carbide was synthetized by sputtering graphite target on heated titanium substrate by magnetron sputtering process. The obtained samples were characterized by X-ray diffraction (XRD) analysis and Raman spectroscopy, the elemental analysis was made by Energy-dispersive X-ray spectroscopy (EDX). Titanium carbide (TiC) structure was obtained by deposition of sputtered carbon atoms and clusters to the resistively heated titanium substrate surface with temperatures 700В В°C, 800В В°C, 900В В°C and 1000В В°C. The XRD analysis showed that the formation of TiC structure is take place when the substrate is heated to 1000В В°C. The Raman spectroscopy showed that when the incident power of laser is 100В % (35В mW) the structure is unstable in samples with the substrate temperatures 700В В°C, 800В В°C and 900В В°C and the most stable titanium carbide structure is created when the substrate temperature is 1000В В°C.
format Article
id doaj-art-12aca8dadd274b15a3bf04eec07fca4e
institution Kabale University
issn 2077-6772
language English
publishDate 2017-10-01
publisher Sumy State University
record_format Article
series Журнал нано- та електронної фізики
spelling doaj-art-12aca8dadd274b15a3bf04eec07fca4e2025-08-20T03:54:20ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722017-10-019505045-105045-310.21272/jnep.9(5).05045Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium SubstrateO.E.В Kaipoldayev0A.D.В Muradov1Y.S.В Mukhametkarimov2R.R.В Nemkayeva3G.A.В Baigarinova4M.B.В Aitzhanov5N.R.В Guseinov6Al-Farabi Kazakh National University, 71, Al-Farabi Ave., 050040 Almaty, KazakhstanAl-Farabi Kazakh National University, 71, Al-Farabi Ave., 050040 Almaty, KazakhstanAl-Farabi Kazakh National University, 71, Al-Farabi Ave., 050040 Almaty, KazakhstanAl-Farabi Kazakh National University, 71, Al-Farabi Ave., 050040 Almaty, KazakhstanAl-Farabi Kazakh National University, 71, Al-Farabi Ave., 050040 Almaty, KazakhstanAl-Farabi Kazakh National University, 71, Al-Farabi Ave., 050040 Almaty, KazakhstanAl-Farabi Kazakh National University, 71, Al-Farabi Ave., 050040 Almaty, KazakhstanTitanium carbide was synthetized by sputtering graphite target on heated titanium substrate by magnetron sputtering process. The obtained samples were characterized by X-ray diffraction (XRD) analysis and Raman spectroscopy, the elemental analysis was made by Energy-dispersive X-ray spectroscopy (EDX). Titanium carbide (TiC) structure was obtained by deposition of sputtered carbon atoms and clusters to the resistively heated titanium substrate surface with temperatures 700В В°C, 800В В°C, 900В В°C and 1000В В°C. The XRD analysis showed that the formation of TiC structure is take place when the substrate is heated to 1000В В°C. The Raman spectroscopy showed that when the incident power of laser is 100В % (35В mW) the structure is unstable in samples with the substrate temperatures 700В В°C, 800В В°C and 900В В°C and the most stable titanium carbide structure is created when the substrate temperature is 1000В В°C.http://jnep.sumdu.edu.ua:8080/download/numbers/2017/5/articles/Proof_JNEP_05045.pdfTitanium carbideMagnetron sputteringRaman spectroscopyTransition-metal carbid
spellingShingle O.E.В Kaipoldayev
A.D.В Muradov
Y.S.В Mukhametkarimov
R.R.В Nemkayeva
G.A.В Baigarinova
M.B.В Aitzhanov
N.R.В Guseinov
Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium Substrate
Журнал нано- та електронної фізики
Titanium carbide
Magnetron sputtering
Raman spectroscopy
Transition-metal carbid
title Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium Substrate
title_full Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium Substrate
title_fullStr Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium Substrate
title_full_unstemmed Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium Substrate
title_short Titanium Carbide Obtained by Magnetron Sputtering of Graphite on Heated Titanium Substrate
title_sort titanium carbide obtained by magnetron sputtering of graphite on heated titanium substrate
topic Titanium carbide
Magnetron sputtering
Raman spectroscopy
Transition-metal carbid
url http://jnep.sumdu.edu.ua:8080/download/numbers/2017/5/articles/Proof_JNEP_05045.pdf
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AT advmuradov titaniumcarbideobtainedbymagnetronsputteringofgraphiteonheatedtitaniumsubstrate
AT ysvmukhametkarimov titaniumcarbideobtainedbymagnetronsputteringofgraphiteonheatedtitaniumsubstrate
AT rrvnemkayeva titaniumcarbideobtainedbymagnetronsputteringofgraphiteonheatedtitaniumsubstrate
AT gavbaigarinova titaniumcarbideobtainedbymagnetronsputteringofgraphiteonheatedtitaniumsubstrate
AT mbvaitzhanov titaniumcarbideobtainedbymagnetronsputteringofgraphiteonheatedtitaniumsubstrate
AT nrvguseinov titaniumcarbideobtainedbymagnetronsputteringofgraphiteonheatedtitaniumsubstrate