Effect of deposition rate and substrate microstructure on gas sensitivity of Te thin films
Tellurium thin films have been prepared using different rates (0.1 ÷ 30 nm/s) by physical deposition in vacuum on glassy, sintered alumina and electrochemically nanostructured Al2O3 substrates. The sensitivity to nitrogen dioxide of fabricated films was tested at room temperature. It is shown that t...
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Engineering Society for Corrosion, Belgrade
2019-12-01
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| Series: | Zaštita Materijala |
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| Online Access: | https://www.zastita-materijala.org/index.php/home/article/view/296 |
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| author | Olga Mocreac |
| author_facet | Olga Mocreac |
| author_sort | Olga Mocreac |
| collection | DOAJ |
| description | Tellurium thin films have been prepared using different rates (0.1 ÷ 30 nm/s) by physical deposition in vacuum on glassy, sintered alumina and electrochemically nanostructured Al2O3 substrates. The sensitivity to nitrogen dioxide of fabricated films was tested at room temperature. It is shown that the deposition rate strongly influences the microstructure of the films in question, as well as their gas sensing properties. The increasing of deposition rate results in transformation of microcrystalline structure of the film into an amorphous one. Simultaneously, both the gas - sensitivity and the response time decrease. The results are explained in terms of interaction between gas molecule and lone - pair electrons of tellurium atoms. |
| format | Article |
| id | doaj-art-1046cff34dca4cc1b1fc83d1d0a6764d |
| institution | OA Journals |
| issn | 0351-9465 2466-2585 |
| language | English |
| publishDate | 2019-12-01 |
| publisher | Engineering Society for Corrosion, Belgrade |
| record_format | Article |
| series | Zaštita Materijala |
| spelling | doaj-art-1046cff34dca4cc1b1fc83d1d0a6764d2025-08-20T01:58:48ZengEngineering Society for Corrosion, BelgradeZaštita Materijala0351-94652466-25852019-12-0160437938410.5937/zasmat1904379M295Effect of deposition rate and substrate microstructure on gas sensitivity of Te thin filmsOlga Mocreac0Technical University of Moldova, Chisinau, MoldovaTellurium thin films have been prepared using different rates (0.1 ÷ 30 nm/s) by physical deposition in vacuum on glassy, sintered alumina and electrochemically nanostructured Al2O3 substrates. The sensitivity to nitrogen dioxide of fabricated films was tested at room temperature. It is shown that the deposition rate strongly influences the microstructure of the films in question, as well as their gas sensing properties. The increasing of deposition rate results in transformation of microcrystalline structure of the film into an amorphous one. Simultaneously, both the gas - sensitivity and the response time decrease. The results are explained in terms of interaction between gas molecule and lone - pair electrons of tellurium atoms.https://www.zastita-materijala.org/index.php/home/article/view/296deposition rategas sensitivityresponse timesubstratethin film |
| spellingShingle | Olga Mocreac Effect of deposition rate and substrate microstructure on gas sensitivity of Te thin films Zaštita Materijala deposition rate gas sensitivity response time substrate thin film |
| title | Effect of deposition rate and substrate microstructure on gas sensitivity of Te thin films |
| title_full | Effect of deposition rate and substrate microstructure on gas sensitivity of Te thin films |
| title_fullStr | Effect of deposition rate and substrate microstructure on gas sensitivity of Te thin films |
| title_full_unstemmed | Effect of deposition rate and substrate microstructure on gas sensitivity of Te thin films |
| title_short | Effect of deposition rate and substrate microstructure on gas sensitivity of Te thin films |
| title_sort | effect of deposition rate and substrate microstructure on gas sensitivity of te thin films |
| topic | deposition rate gas sensitivity response time substrate thin film |
| url | https://www.zastita-materijala.org/index.php/home/article/view/296 |
| work_keys_str_mv | AT olgamocreac effectofdepositionrateandsubstratemicrostructureongassensitivityoftethinfilms |