Stress modulation of hafnium-based ferroelectric material orientation in 3D cylindrical capacitor
Hafnium-based ferroelectric materials have attracted a lot of attention, but the distributions of the materials need to be tuned for commercialization, including phase distribution and polarization orientation distribution. The orientation of ferroelectric materials plays a significant role in memor...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-02-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0230610 |
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