The Design of a Closed-Loop Piezoelectric Friction–Inertia XY Positioning Platform with a Centimeter Travel Range
Friction–inertia piezoelectric actuators can perform long-range positioning with nanometer resolution. However, friction and inertia are not easy to control and can influence the actuator’s performance. The present study proposes a friction–inertia-type piezoelectric XY positioning platform with a s...
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| Main Authors: | Zheng-Rong Guo, Hong-Sheng Tan, Chin-Shun Chang, Ing-Shouh Hwang, En-Te Hwu, Hsien-Shun Liao |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-05-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/14/6/265 |
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