The Design of a Closed-Loop Piezoelectric Friction–Inertia XY Positioning Platform with a Centimeter Travel Range
Friction–inertia piezoelectric actuators can perform long-range positioning with nanometer resolution. However, friction and inertia are not easy to control and can influence the actuator’s performance. The present study proposes a friction–inertia-type piezoelectric XY positioning platform with a s...
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MDPI AG
2025-05-01
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| Series: | Actuators |
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| Online Access: | https://www.mdpi.com/2076-0825/14/6/265 |
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| author | Zheng-Rong Guo Hong-Sheng Tan Chin-Shun Chang Ing-Shouh Hwang En-Te Hwu Hsien-Shun Liao |
| author_facet | Zheng-Rong Guo Hong-Sheng Tan Chin-Shun Chang Ing-Shouh Hwang En-Te Hwu Hsien-Shun Liao |
| author_sort | Zheng-Rong Guo |
| collection | DOAJ |
| description | Friction–inertia piezoelectric actuators can perform long-range positioning with nanometer resolution. However, friction and inertia are not easy to control and can influence the actuator’s performance. The present study proposes a friction–inertia-type piezoelectric XY positioning platform with a simple structure, which uses magnets to provide stable normal force and friction. Sliders and rails were used to provide long travel ranges of 80 mm and 70 mm in the X and Y directions, respectively. Compact optical encoders were installed on the platform to enhance the positioning accuracy. With a three-phase positioning strategy involving both stepping and closed-loop methods, the system achieved a positioning accuracy of 3 µm (0.03%) and a repeatability of 325 nm (0.0033%) over a 10 mm long travel range. The positioning resolution was 4.7 nm, which was primarily limited by optical encoder noise under the closed-loop control mode. An astigmatic optical profilometer was used for the wide-range and high-resolution surface imaging of the XY positioning platform. |
| format | Article |
| id | doaj-art-0e800dca5abe4c2dbeaefd282750144e |
| institution | Kabale University |
| issn | 2076-0825 |
| language | English |
| publishDate | 2025-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Actuators |
| spelling | doaj-art-0e800dca5abe4c2dbeaefd282750144e2025-08-20T03:26:22ZengMDPI AGActuators2076-08252025-05-0114626510.3390/act14060265The Design of a Closed-Loop Piezoelectric Friction–Inertia XY Positioning Platform with a Centimeter Travel RangeZheng-Rong Guo0Hong-Sheng Tan1Chin-Shun Chang2Ing-Shouh Hwang3En-Te Hwu4Hsien-Shun Liao5Department of Mechanical Engineering, National Taiwan University, Taipei 10617, TaiwanDepartment of Mechanical Engineering, National Taiwan University, Taipei 10617, TaiwanDepartment of Mechanical Engineering, National Taiwan University, Taipei 10617, TaiwanInstitute of Physics, Academia Sinica, Taipei 11529, TaiwanDepartment of Health Technology, Technical University of Denmark, 2800 Lyngby, DenmarkDepartment of Mechanical Engineering, National Taiwan University, Taipei 10617, TaiwanFriction–inertia piezoelectric actuators can perform long-range positioning with nanometer resolution. However, friction and inertia are not easy to control and can influence the actuator’s performance. The present study proposes a friction–inertia-type piezoelectric XY positioning platform with a simple structure, which uses magnets to provide stable normal force and friction. Sliders and rails were used to provide long travel ranges of 80 mm and 70 mm in the X and Y directions, respectively. Compact optical encoders were installed on the platform to enhance the positioning accuracy. With a three-phase positioning strategy involving both stepping and closed-loop methods, the system achieved a positioning accuracy of 3 µm (0.03%) and a repeatability of 325 nm (0.0033%) over a 10 mm long travel range. The positioning resolution was 4.7 nm, which was primarily limited by optical encoder noise under the closed-loop control mode. An astigmatic optical profilometer was used for the wide-range and high-resolution surface imaging of the XY positioning platform.https://www.mdpi.com/2076-0825/14/6/265nanopositioningfriction–inertia piezoelectric actuatorclosed-loop control |
| spellingShingle | Zheng-Rong Guo Hong-Sheng Tan Chin-Shun Chang Ing-Shouh Hwang En-Te Hwu Hsien-Shun Liao The Design of a Closed-Loop Piezoelectric Friction–Inertia XY Positioning Platform with a Centimeter Travel Range Actuators nanopositioning friction–inertia piezoelectric actuator closed-loop control |
| title | The Design of a Closed-Loop Piezoelectric Friction–Inertia XY Positioning Platform with a Centimeter Travel Range |
| title_full | The Design of a Closed-Loop Piezoelectric Friction–Inertia XY Positioning Platform with a Centimeter Travel Range |
| title_fullStr | The Design of a Closed-Loop Piezoelectric Friction–Inertia XY Positioning Platform with a Centimeter Travel Range |
| title_full_unstemmed | The Design of a Closed-Loop Piezoelectric Friction–Inertia XY Positioning Platform with a Centimeter Travel Range |
| title_short | The Design of a Closed-Loop Piezoelectric Friction–Inertia XY Positioning Platform with a Centimeter Travel Range |
| title_sort | design of a closed loop piezoelectric friction inertia xy positioning platform with a centimeter travel range |
| topic | nanopositioning friction–inertia piezoelectric actuator closed-loop control |
| url | https://www.mdpi.com/2076-0825/14/6/265 |
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