The Design of a Closed-Loop Piezoelectric Friction–Inertia XY Positioning Platform with a Centimeter Travel Range
Friction–inertia piezoelectric actuators can perform long-range positioning with nanometer resolution. However, friction and inertia are not easy to control and can influence the actuator’s performance. The present study proposes a friction–inertia-type piezoelectric XY positioning platform with a s...
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-05-01
|
| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/14/6/265 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Summary: | Friction–inertia piezoelectric actuators can perform long-range positioning with nanometer resolution. However, friction and inertia are not easy to control and can influence the actuator’s performance. The present study proposes a friction–inertia-type piezoelectric XY positioning platform with a simple structure, which uses magnets to provide stable normal force and friction. Sliders and rails were used to provide long travel ranges of 80 mm and 70 mm in the X and Y directions, respectively. Compact optical encoders were installed on the platform to enhance the positioning accuracy. With a three-phase positioning strategy involving both stepping and closed-loop methods, the system achieved a positioning accuracy of 3 µm (0.03%) and a repeatability of 325 nm (0.0033%) over a 10 mm long travel range. The positioning resolution was 4.7 nm, which was primarily limited by optical encoder noise under the closed-loop control mode. An astigmatic optical profilometer was used for the wide-range and high-resolution surface imaging of the XY positioning platform. |
|---|---|
| ISSN: | 2076-0825 |