Composite Layer Formation with Island Nanostructures in Vacuum
Introduction. The current trends in the development of electronics require miniaturized devices with increased performance at affordable costs. The introduction of nanoscale structures and layers based thereon, including island structures, offers great opportunities for the development of various br...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Saint Petersburg Electrotechnical University "LETI"
2025-05-01
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| Series: | Известия высших учебных заведений России: Радиоэлектроника |
| Subjects: | |
| Online Access: | https://re.eltech.ru/jour/article/view/998 |
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