Marginal Design of a Pneumatic Stage Position Using Filtered Right Coprime Factorization and PPC-SMC
In recent years, pneumatic stages have attracted attention as stages for semiconductor manufacturing equipment due to their low cost and minimal maintenance requirements. However, pneumatic stages include nonlinear elements such as friction and air compressibility, making precise control challenging...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-07-01
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| Series: | Axioms |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2075-1680/14/7/534 |
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