Capacitive‐Type Two‐Axis Accelerometer with Liquid‐Type Proof Mass
Abstract Utilizing the advantages of a liquid metal (LM) (i.e., mercury) and its electro‐mechanical properties (i.e., high density, high surface tension, and high electrical conductivity), a novel capacitive‐type two‐axis accelerometer is proposed. The device employs a liquid‐type proof mass (i.e.,...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley-VCH
2020-06-01
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| Series: | Advanced Electronic Materials |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/aelm.201901265 |
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