Optimizing the growth conditions of superconducting MoSi thin films for single photon detection
Abstract We investigate the growth of amorphous MoSi thin films using magnetron co-sputtering and optimize the growth conditions with respect to crystal structure and superconducting properties (e.g., critical temperature $$T_{\text {c}}$$ ). The deposition pressure, Mo:Si stoichiometry and substrat...
Saved in:
| Main Authors: | , , , , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-01-01
|
| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-025-86303-5 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|