Recent Advances in Atomic Force Microscopy‐Based Local Anodic Oxidation Nanolithography of 2D Materials
Abstract 2D materials garner significant research interest due to their unique properties. However, fabricating 2D material electronic devices requires arraying these materials, which often leads to issues like residual photoresist and the need for expensive equipment such as E‐beam and optical lith...
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| Main Authors: | Jing Yu, Abdulsalam Aji Suleiman, Jing‐Wen Shi, Ruey Jinq Ong, Francis Chi‐Chung Ling, Weiwen Zhang |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley-VCH
2025-08-01
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| Series: | Advanced Materials Interfaces |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/admi.202500137 |
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