A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic Ellipsometry

A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic Ellipsometry

A data-fitting method based on the whale optimization algorithm (WOA) is proposed to determine the thickness and refractive index of films measured by spectroscopic ellipsometry (SE). To demonstrate this method, tin oxide (SnO<sub>2</sub>) films with transparent wavelength coverage (400–...

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Bibliographic Details
Main Authors: Liyuan Ma, Xipeng Xu, Changcai Cui, Mai Gao, Tukun Li, Shan Lou, Paul J. Scott, Xiangqian Jiang, Wenhan Zeng
Format: Article
Language:English
Published: MDPI AG 2025-01-01
Series:Photonics
Subjects:
spectroscopic ellipsometry
whale optimization algorithm
thickness
refractive index
tin oxide
Online Access:https://www.mdpi.com/2304-6732/12/1/60
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