A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic Ellipsometry
A data-fitting method based on the whale optimization algorithm (WOA) is proposed to determine the thickness and refractive index of films measured by spectroscopic ellipsometry (SE). To demonstrate this method, tin oxide (SnO<sub>2</sub>) films with transparent wavelength coverage (400–...
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| Format: | Article |
| Language: | English |
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MDPI AG
2025-01-01
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| Series: | Photonics |
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| Online Access: | https://www.mdpi.com/2304-6732/12/1/60 |
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| author | Liyuan Ma Xipeng Xu Changcai Cui Mai Gao Tukun Li Shan Lou Paul J. Scott Xiangqian Jiang Wenhan Zeng |
| author_facet | Liyuan Ma Xipeng Xu Changcai Cui Mai Gao Tukun Li Shan Lou Paul J. Scott Xiangqian Jiang Wenhan Zeng |
| author_sort | Liyuan Ma |
| collection | DOAJ |
| description | A data-fitting method based on the whale optimization algorithm (WOA) is proposed to determine the thickness and refractive index of films measured by spectroscopic ellipsometry (SE). To demonstrate this method, tin oxide (SnO<sub>2</sub>) films with transparent wavelength coverage (400–800 nm) are evaluated. The comparative analysis indicates that Psi and Delta parameter curves based on WOA fitting align more closely with those obtained through experiments. Furthermore, the thickness and refractive index of films obtained by WOA are in nearly agreement with the results from the well-known Levenberg–Marquardt (LM) algorithm. This validation confirms that it has great potential in the determination of film parameters in ellipsometry data fitting. |
| format | Article |
| id | doaj-art-0b92042ec04c40b99db4d254c45e6622 |
| institution | Kabale University |
| issn | 2304-6732 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Photonics |
| spelling | doaj-art-0b92042ec04c40b99db4d254c45e66222025-01-24T13:46:22ZengMDPI AGPhotonics2304-67322025-01-011216010.3390/photonics12010060A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic EllipsometryLiyuan Ma0Xipeng Xu1Changcai Cui2Mai Gao3Tukun Li4Shan Lou5Paul J. Scott6Xiangqian Jiang7Wenhan Zeng8Institute of Manufacturing Engineering, Huaqiao University, Xiamen 361021, ChinaInstitute of Manufacturing Engineering, Huaqiao University, Xiamen 361021, ChinaCollege of Metrology Measurement and Instrument, China Jiliang University, Hangzhou 310018, ChinaSchool of Design and Engineering, National University of Singapore, Singapore 119077, SingaporeEPSRC Future Advanced Metrology Hub, University of Huddersfield, Huddersfield HD1 3DH, UKEPSRC Future Advanced Metrology Hub, University of Huddersfield, Huddersfield HD1 3DH, UKEPSRC Future Advanced Metrology Hub, University of Huddersfield, Huddersfield HD1 3DH, UKEPSRC Future Advanced Metrology Hub, University of Huddersfield, Huddersfield HD1 3DH, UKEPSRC Future Advanced Metrology Hub, University of Huddersfield, Huddersfield HD1 3DH, UKA data-fitting method based on the whale optimization algorithm (WOA) is proposed to determine the thickness and refractive index of films measured by spectroscopic ellipsometry (SE). To demonstrate this method, tin oxide (SnO<sub>2</sub>) films with transparent wavelength coverage (400–800 nm) are evaluated. The comparative analysis indicates that Psi and Delta parameter curves based on WOA fitting align more closely with those obtained through experiments. Furthermore, the thickness and refractive index of films obtained by WOA are in nearly agreement with the results from the well-known Levenberg–Marquardt (LM) algorithm. This validation confirms that it has great potential in the determination of film parameters in ellipsometry data fitting.https://www.mdpi.com/2304-6732/12/1/60spectroscopic ellipsometrywhale optimization algorithmthicknessrefractive indextin oxide |
| spellingShingle | Liyuan Ma Xipeng Xu Changcai Cui Mai Gao Tukun Li Shan Lou Paul J. Scott Xiangqian Jiang Wenhan Zeng A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic Ellipsometry Photonics spectroscopic ellipsometry whale optimization algorithm thickness refractive index tin oxide |
| title | A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic Ellipsometry |
| title_full | A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic Ellipsometry |
| title_fullStr | A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic Ellipsometry |
| title_full_unstemmed | A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic Ellipsometry |
| title_short | A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic Ellipsometry |
| title_sort | whale optimization algorithm based data fitting method to determine the parameters of films measured by spectroscopic ellipsometry |
| topic | spectroscopic ellipsometry whale optimization algorithm thickness refractive index tin oxide |
| url | https://www.mdpi.com/2304-6732/12/1/60 |
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