Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures

Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures

Three-way scanning electron microscope (SEM) moiré was first generated using a designed three-way electron beam (EB) in an SEM. The spot-type three-way SEM moiré comes from the interference between the three-way EB and the specimen grating in which the periodic cells are arranged in a triangular man...

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Bibliographic Details
Main Authors:	Qinghua Wang, Satoshi Kishimoto, Hiroshi Tsuda
Format:	Article
Language:	English
Published:	Wiley 2014-01-01
Series:	The Scientific World Journal
Online Access:	http://dx.doi.org/10.1155/2014/281954
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