Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures
Three-way scanning electron microscope (SEM) moiré was first generated using a designed three-way electron beam (EB) in an SEM. The spot-type three-way SEM moiré comes from the interference between the three-way EB and the specimen grating in which the periodic cells are arranged in a triangular man...
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| Format: | Article |
| Language: | English |
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Wiley
2014-01-01
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| Series: | The Scientific World Journal |
| Online Access: | http://dx.doi.org/10.1155/2014/281954 |
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| author | Qinghua Wang Satoshi Kishimoto Hiroshi Tsuda |
| author_facet | Qinghua Wang Satoshi Kishimoto Hiroshi Tsuda |
| author_sort | Qinghua Wang |
| collection | DOAJ |
| description | Three-way scanning electron microscope (SEM) moiré was first generated using a designed three-way electron beam (EB) in an SEM. The spot-type three-way SEM moiré comes from the interference between the three-way EB and the specimen grating in which the periodic cells are arranged in a triangular manner. The deformation and the structure information of the specimen grating in three directions can be simultaneously obtained from the three-way SEM moiré. The design considerations of the three-way EB were discussed. As an illustration, the three-way SEM moiré spots produced on a silicon slide were presented. The proposed three-way SEM moiré method is expected to characterize micro/nanostructures in triangular or hexagonal arrangements in three directions at the same time. |
| format | Article |
| id | doaj-art-0a102397bb3e47979aa014a950d16454 |
| institution | Kabale University |
| issn | 2356-6140 1537-744X |
| language | English |
| publishDate | 2014-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | The Scientific World Journal |
| spelling | doaj-art-0a102397bb3e47979aa014a950d164542025-02-03T06:13:19ZengWileyThe Scientific World Journal2356-61401537-744X2014-01-01201410.1155/2014/281954281954Formation of Three-Way Scanning Electron Microscope Moiré on Micro/NanostructuresQinghua Wang0Satoshi Kishimoto1Hiroshi Tsuda2Research Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, JapanHybrid Materials Unit, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, JapanResearch Institute of Instrumentation Frontier, National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, JapanThree-way scanning electron microscope (SEM) moiré was first generated using a designed three-way electron beam (EB) in an SEM. The spot-type three-way SEM moiré comes from the interference between the three-way EB and the specimen grating in which the periodic cells are arranged in a triangular manner. The deformation and the structure information of the specimen grating in three directions can be simultaneously obtained from the three-way SEM moiré. The design considerations of the three-way EB were discussed. As an illustration, the three-way SEM moiré spots produced on a silicon slide were presented. The proposed three-way SEM moiré method is expected to characterize micro/nanostructures in triangular or hexagonal arrangements in three directions at the same time.http://dx.doi.org/10.1155/2014/281954 |
| spellingShingle | Qinghua Wang Satoshi Kishimoto Hiroshi Tsuda Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures The Scientific World Journal |
| title | Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures |
| title_full | Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures |
| title_fullStr | Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures |
| title_full_unstemmed | Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures |
| title_short | Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures |
| title_sort | formation of three way scanning electron microscope moire on micro nanostructures |
| url | http://dx.doi.org/10.1155/2014/281954 |
| work_keys_str_mv | AT qinghuawang formationofthreewayscanningelectronmicroscopemoireonmicronanostructures AT satoshikishimoto formationofthreewayscanningelectronmicroscopemoireonmicronanostructures AT hiroshitsuda formationofthreewayscanningelectronmicroscopemoireonmicronanostructures |