Kang, S. O., Lee, U. J., Kim, S. H., You, H. J., Park, K., Park, S. E., & Park, J. H. Gas Nozzle Effect on the Deposition of Polysilicon by Monosilane Siemens Reactor. Wiley.
Chicago Style (17th ed.) CitationKang, Seung Oh, Uk June Lee, Seung Hyun Kim, Ho Jung You, Kun Park, Sung Eun Park, and Jong Hoon Park. Gas Nozzle Effect on the Deposition of Polysilicon by Monosilane Siemens Reactor. Wiley.
MLA (9th ed.) CitationKang, Seung Oh, et al. Gas Nozzle Effect on the Deposition of Polysilicon by Monosilane Siemens Reactor. Wiley.
Warning: These citations may not always be 100% accurate.