A novel bipolar pulse electrochemical polishing approach for ultra-precision conformal polishing of microlens arrays
Ultra-precision polishing technology is an effective method for removing mechanical defects, such as knife lines and burrs, from the surfaces of optical microstructure components. The contact polishing method does not satisfy the requirements for conformal polishing of microstructures, as the polish...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-05-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S223878542501138X |
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