A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors
We demonstrate an experimental assessment of a high-Q, high-angle piezoelectric (2 µm PZT) MEMS scanning micromirror featuring distributed backside reinforcement, suitable for applications demanding energy-efficient and high-quality image projection. Frequency response measurements at 10 different v...
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| Format: | Article |
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MDPI AG
2024-04-01
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| Online Access: | https://www.mdpi.com/2504-3900/97/1/144 |
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| author | Clement Fleury Markus Bainschab Gianluca Mendicino Roberto Carminati Pooja Thakkar Dominik Holzmann Sara Guerreiro Adrien Piot |
| author_facet | Clement Fleury Markus Bainschab Gianluca Mendicino Roberto Carminati Pooja Thakkar Dominik Holzmann Sara Guerreiro Adrien Piot |
| author_sort | Clement Fleury |
| collection | DOAJ |
| description | We demonstrate an experimental assessment of a high-Q, high-angle piezoelectric (2 µm PZT) MEMS scanning micromirror featuring distributed backside reinforcement, suitable for applications demanding energy-efficient and high-quality image projection. Frequency response measurements at 10 different vacuum levels ranging from atmospheric pressure to 10<sup>−6</sup> mbar allow for the quantitative separation of damping mechanisms (air and structural). Stroboscopic digital holographic microscopy was used to assess the static and dynamic deformation of the mirror surface. The experimental results are in good agreement with simulations and models. |
| format | Article |
| id | doaj-art-07eca75a1c0c4e399f708cc0898eb040 |
| institution | DOAJ |
| issn | 2504-3900 |
| language | English |
| publishDate | 2024-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Proceedings |
| spelling | doaj-art-07eca75a1c0c4e399f708cc0898eb0402025-08-20T02:56:54ZengMDPI AGProceedings2504-39002024-04-0197114410.3390/proceedings2024097144A Comprehensive Characterization Procedure for Resonant MEMS Scanning MirrorsClement Fleury0Markus Bainschab1Gianluca Mendicino2Roberto Carminati3Pooja Thakkar4Dominik Holzmann5Sara Guerreiro6Adrien Piot7Silicon Austria Labs GmbH, Sandgasse 34, 8010 Graz, AustriaSilicon Austria Labs GmbH, Sandgasse 34, 8010 Graz, AustriaSTMicroelectronics, Via Paracelso, 20, 20864 Agrate Brianza, MB, ItalySTMicroelectronics, Via Paracelso, 20, 20864 Agrate Brianza, MB, ItalySilicon Austria Labs GmbH, Sandgasse 34, 8010 Graz, AustriaSilicon Austria Labs GmbH, Sandgasse 34, 8010 Graz, AustriaSilicon Austria Labs GmbH, Sandgasse 34, 8010 Graz, AustriaSilicon Austria Labs GmbH, Sandgasse 34, 8010 Graz, AustriaWe demonstrate an experimental assessment of a high-Q, high-angle piezoelectric (2 µm PZT) MEMS scanning micromirror featuring distributed backside reinforcement, suitable for applications demanding energy-efficient and high-quality image projection. Frequency response measurements at 10 different vacuum levels ranging from atmospheric pressure to 10<sup>−6</sup> mbar allow for the quantitative separation of damping mechanisms (air and structural). Stroboscopic digital holographic microscopy was used to assess the static and dynamic deformation of the mirror surface. The experimental results are in good agreement with simulations and models.https://www.mdpi.com/2504-3900/97/1/144MEMSscanning micromirrorair dampingdynamic deformation |
| spellingShingle | Clement Fleury Markus Bainschab Gianluca Mendicino Roberto Carminati Pooja Thakkar Dominik Holzmann Sara Guerreiro Adrien Piot A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors Proceedings MEMS scanning micromirror air damping dynamic deformation |
| title | A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors |
| title_full | A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors |
| title_fullStr | A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors |
| title_full_unstemmed | A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors |
| title_short | A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors |
| title_sort | comprehensive characterization procedure for resonant mems scanning mirrors |
| topic | MEMS scanning micromirror air damping dynamic deformation |
| url | https://www.mdpi.com/2504-3900/97/1/144 |
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