The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process
In this study, we present two configurations of piezo-actuated microspeakers, which were fabricated by combining a self-developed aerosol deposition method with the metal MEMS microfabrication process. The stainless steel used was structurally designed to enhance the displacement amplitude of the sp...
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MDPI AG
2025-03-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/16/3/353 |
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| author | Wei-Ting Shih Wan-Hsin Tsou Dejan Vasic François Costa Wen-Jong Wu |
| author_facet | Wei-Ting Shih Wan-Hsin Tsou Dejan Vasic François Costa Wen-Jong Wu |
| author_sort | Wei-Ting Shih |
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| description | In this study, we present two configurations of piezo-actuated microspeakers, which were fabricated by combining a self-developed aerosol deposition method with the metal MEMS microfabrication process. The stainless steel used was structurally designed to enhance the displacement amplitude of the speaker, which is related to its sound pressure level. The two packaged speakers were measured using the IEC 60318-4 standard. The package around the speaker contains a printed circuit board with the dimensions in 20.0 mm × 13.0 mm × 3.0 mm. In an enclosed field test, the bimorph single-layer (BSL) configuration reached sound levels of 98.4 dB and 92.4 dB using driving voltages of 30 Vpp and 15 Vpp at 1 kHz, respectively; however, the bimorph multi-layer (BML) configuration reached higher levels of 108.2 dB and 102.2 dB under the same conditions. |
| format | Article |
| id | doaj-art-079e3619982b4aa599e858f25e4d4af5 |
| institution | Kabale University |
| issn | 2072-666X |
| language | English |
| publishDate | 2025-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-079e3619982b4aa599e858f25e4d4af52025-08-20T03:43:14ZengMDPI AGMicromachines2072-666X2025-03-0116335310.3390/mi16030353The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS ProcessWei-Ting Shih0Wan-Hsin Tsou1Dejan Vasic2François Costa3Wen-Jong Wu4Department of Engineering Science and Ocean Engineering, National Taiwan University, Taipei 10617, TaiwanDepartment of Engineering Science and Ocean Engineering, National Taiwan University, Taipei 10617, TaiwanCY Cergy Paris University, 95000 Cergy, FranceUniversity Paris-Est Créteil, INSPE, 94000 Créteil, FranceDepartment of Engineering Science and Ocean Engineering, National Taiwan University, Taipei 10617, TaiwanIn this study, we present two configurations of piezo-actuated microspeakers, which were fabricated by combining a self-developed aerosol deposition method with the metal MEMS microfabrication process. The stainless steel used was structurally designed to enhance the displacement amplitude of the speaker, which is related to its sound pressure level. The two packaged speakers were measured using the IEC 60318-4 standard. The package around the speaker contains a printed circuit board with the dimensions in 20.0 mm × 13.0 mm × 3.0 mm. In an enclosed field test, the bimorph single-layer (BSL) configuration reached sound levels of 98.4 dB and 92.4 dB using driving voltages of 30 Vpp and 15 Vpp at 1 kHz, respectively; however, the bimorph multi-layer (BML) configuration reached higher levels of 108.2 dB and 102.2 dB under the same conditions.https://www.mdpi.com/2072-666X/16/3/353piezoeletricMEMS speakerpiezo stackingbimorphpackaging |
| spellingShingle | Wei-Ting Shih Wan-Hsin Tsou Dejan Vasic François Costa Wen-Jong Wu The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process Micromachines piezoeletric MEMS speaker piezo stacking bimorph packaging |
| title | The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process |
| title_full | The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process |
| title_fullStr | The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process |
| title_full_unstemmed | The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process |
| title_short | The Woofer-Type Piezo-Actuated Microspeaker Based on Aerosol Deposition and Metal MEMS Process |
| title_sort | woofer type piezo actuated microspeaker based on aerosol deposition and metal mems process |
| topic | piezoeletric MEMS speaker piezo stacking bimorph packaging |
| url | https://www.mdpi.com/2072-666X/16/3/353 |
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