Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor Deposition
The microcrystalline p-SiC/i-Si/n-Si thin film solar cells treated with hydrogen plasma were fabricated at low temperature using a CO2 laser-assisted plasma enhanced chemical vapor deposition (LAPECVD) system. According to the micro-Raman results, the i-Si films shifted from 482 cm−1 to 512 cm−1 as...
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| Format: | Article |
| Language: | English |
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Wiley
2014-01-01
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| Series: | International Journal of Photoenergy |
| Online Access: | http://dx.doi.org/10.1155/2014/795152 |
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| author | Hsin-Ying Lee Ting-Chun Wang Chun-Yen Tseng |
| author_facet | Hsin-Ying Lee Ting-Chun Wang Chun-Yen Tseng |
| author_sort | Hsin-Ying Lee |
| collection | DOAJ |
| description | The microcrystalline p-SiC/i-Si/n-Si thin film solar cells treated with hydrogen plasma were fabricated at low temperature using a CO2 laser-assisted plasma enhanced chemical vapor deposition (LAPECVD) system. According to the micro-Raman results, the i-Si films shifted from 482 cm−1 to 512 cm−1 as the assisting laser power increased from 0 W to 80 W, which indicated a gradual transformation from amorphous to crystalline Si. From X-ray diffraction (XRD) results, the microcrystalline i-Si films with (111), (220), and (311) diffraction were obtained. Compared with the Si-based thin film solar cells deposited without laser assistance, the short-circuit current density and the power conversion efficiency of the solar cells with assisting laser power of 80 W were improved from 14.38 mA/cm2 to 18.16 mA/cm2 and from 6.89% to 8.58%, respectively. |
| format | Article |
| id | doaj-art-07257f6dcc5e4e12b1b1f10bab91d398 |
| institution | Kabale University |
| issn | 1110-662X 1687-529X |
| language | English |
| publishDate | 2014-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | International Journal of Photoenergy |
| spelling | doaj-art-07257f6dcc5e4e12b1b1f10bab91d3982025-08-20T03:55:24ZengWileyInternational Journal of Photoenergy1110-662X1687-529X2014-01-01201410.1155/2014/795152795152Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor DepositionHsin-Ying Lee0Ting-Chun Wang1Chun-Yen Tseng2Department of Photonics, Research Center Energy Technology and Strategy, Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan 701, TaiwanDepartment of Photonics, Research Center Energy Technology and Strategy, Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan 701, TaiwanInstitute of Microelectronics, Department of Electrical Engineering, Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan 701, TaiwanThe microcrystalline p-SiC/i-Si/n-Si thin film solar cells treated with hydrogen plasma were fabricated at low temperature using a CO2 laser-assisted plasma enhanced chemical vapor deposition (LAPECVD) system. According to the micro-Raman results, the i-Si films shifted from 482 cm−1 to 512 cm−1 as the assisting laser power increased from 0 W to 80 W, which indicated a gradual transformation from amorphous to crystalline Si. From X-ray diffraction (XRD) results, the microcrystalline i-Si films with (111), (220), and (311) diffraction were obtained. Compared with the Si-based thin film solar cells deposited without laser assistance, the short-circuit current density and the power conversion efficiency of the solar cells with assisting laser power of 80 W were improved from 14.38 mA/cm2 to 18.16 mA/cm2 and from 6.89% to 8.58%, respectively.http://dx.doi.org/10.1155/2014/795152 |
| spellingShingle | Hsin-Ying Lee Ting-Chun Wang Chun-Yen Tseng Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor Deposition International Journal of Photoenergy |
| title | Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor Deposition |
| title_full | Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor Deposition |
| title_fullStr | Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor Deposition |
| title_full_unstemmed | Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor Deposition |
| title_short | Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor Deposition |
| title_sort | performance improvement of microcrystalline p sic i si n si thin film solar cells by using laser assisted plasma enhanced chemical vapor deposition |
| url | http://dx.doi.org/10.1155/2014/795152 |
| work_keys_str_mv | AT hsinyinglee performanceimprovementofmicrocrystallinepsicisinsithinfilmsolarcellsbyusinglaserassistedplasmaenhancedchemicalvapordeposition AT tingchunwang performanceimprovementofmicrocrystallinepsicisinsithinfilmsolarcellsbyusinglaserassistedplasmaenhancedchemicalvapordeposition AT chunyentseng performanceimprovementofmicrocrystallinepsicisinsithinfilmsolarcellsbyusinglaserassistedplasmaenhancedchemicalvapordeposition |