Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure Sensor

The micro resonant pressure sensor outputs the frequency signals where the distortion does not take place in a long distance transmission. As the dimensions of the sensor decrease, the effects of the van der Waals forces should be considered. Here, a coupled dynamic model of the micro resonant press...

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Bibliographic Details
Main Authors: Lizhong Xu, Yulei Liu, Xiaorui Fu
Format: Article
Language:English
Published: Wiley 2016-01-01
Series:Shock and Vibration
Online Access:http://dx.doi.org/10.1155/2016/3426196
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