Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure Sensor
The micro resonant pressure sensor outputs the frequency signals where the distortion does not take place in a long distance transmission. As the dimensions of the sensor decrease, the effects of the van der Waals forces should be considered. Here, a coupled dynamic model of the micro resonant press...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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Wiley
2016-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2016/3426196 |
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| _version_ | 1849305540471029760 |
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| author | Lizhong Xu Yulei Liu Xiaorui Fu |
| author_facet | Lizhong Xu Yulei Liu Xiaorui Fu |
| author_sort | Lizhong Xu |
| collection | DOAJ |
| description | The micro resonant pressure sensor outputs the frequency signals where the distortion does not take place in a long distance transmission. As the dimensions of the sensor decrease, the effects of the van der Waals forces should be considered. Here, a coupled dynamic model of the micro resonant pressure sensor is proposed and its coupled dynamic equation is given in which the van der Waals force is considered. By the equation, the effects of the van der Waals force on the natural frequencies and vibration amplitudes of the micro resonant pressure sensor are investigated. Results show that the natural frequency and the vibrating amplitudes of the micro resonant pressure sensor are affected significantly by van der Waals force for a small clearance between the film and the base plate, a small initial tension stress of the film, and some other conditions. |
| format | Article |
| id | doaj-art-06d747bc15e8498988b00a7d4d90bc27 |
| institution | Kabale University |
| issn | 1070-9622 1875-9203 |
| language | English |
| publishDate | 2016-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Shock and Vibration |
| spelling | doaj-art-06d747bc15e8498988b00a7d4d90bc272025-08-20T03:55:24ZengWileyShock and Vibration1070-96221875-92032016-01-01201610.1155/2016/34261963426196Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure SensorLizhong Xu0Yulei Liu1Xiaorui Fu2Mechanical Engineering Institute, Yanshan University, Qinhuangdao 066004, ChinaMechanical Engineering Institute, Yanshan University, Qinhuangdao 066004, ChinaMechanical Engineering Institute, Yanshan University, Qinhuangdao 066004, ChinaThe micro resonant pressure sensor outputs the frequency signals where the distortion does not take place in a long distance transmission. As the dimensions of the sensor decrease, the effects of the van der Waals forces should be considered. Here, a coupled dynamic model of the micro resonant pressure sensor is proposed and its coupled dynamic equation is given in which the van der Waals force is considered. By the equation, the effects of the van der Waals force on the natural frequencies and vibration amplitudes of the micro resonant pressure sensor are investigated. Results show that the natural frequency and the vibrating amplitudes of the micro resonant pressure sensor are affected significantly by van der Waals force for a small clearance between the film and the base plate, a small initial tension stress of the film, and some other conditions.http://dx.doi.org/10.1155/2016/3426196 |
| spellingShingle | Lizhong Xu Yulei Liu Xiaorui Fu Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure Sensor Shock and Vibration |
| title | Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure Sensor |
| title_full | Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure Sensor |
| title_fullStr | Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure Sensor |
| title_full_unstemmed | Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure Sensor |
| title_short | Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure Sensor |
| title_sort | effects of the van der waals force on the dynamics performance for a micro resonant pressure sensor |
| url | http://dx.doi.org/10.1155/2016/3426196 |
| work_keys_str_mv | AT lizhongxu effectsofthevanderwaalsforceonthedynamicsperformanceforamicroresonantpressuresensor AT yuleiliu effectsofthevanderwaalsforceonthedynamicsperformanceforamicroresonantpressuresensor AT xiaoruifu effectsofthevanderwaalsforceonthedynamicsperformanceforamicroresonantpressuresensor |