High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale
We will report about the development of fiber-laser-driven high harmonic sources with output power currently exceeding 10 mW. This exceptional performance, combined with structured illumination approaches, enables nanoscale imaging and mapping of the chemical composition of semiconductor- and biolog...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2024-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2024/17/epjconf_eph2024_03001.pdf |
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