High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale
We will report about the development of fiber-laser-driven high harmonic sources with output power currently exceeding 10 mW. This exceptional performance, combined with structured illumination approaches, enables nanoscale imaging and mapping of the chemical composition of semiconductor- and biolog...
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| Format: | Article |
| Language: | English |
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EDP Sciences
2024-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2024/17/epjconf_eph2024_03001.pdf |
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| _version_ | 1850206726932922368 |
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| author | Limpert Jens Rothhardt Jan |
| author_facet | Limpert Jens Rothhardt Jan |
| author_sort | Limpert Jens |
| collection | DOAJ |
| description | We will report about the development of fiber-laser-driven high harmonic sources with output power currently exceeding 10 mW. This exceptional performance, combined with structured illumination approaches, enables nanoscale imaging and mapping of the chemical composition of semiconductor- and biological samples at the nanoscale. |
| format | Article |
| id | doaj-art-06a4cc57edb84ccb8465a83a6ded238a |
| institution | OA Journals |
| issn | 2100-014X |
| language | English |
| publishDate | 2024-01-01 |
| publisher | EDP Sciences |
| record_format | Article |
| series | EPJ Web of Conferences |
| spelling | doaj-art-06a4cc57edb84ccb8465a83a6ded238a2025-08-20T02:10:42ZengEDP SciencesEPJ Web of Conferences2100-014X2024-01-013070300110.1051/epjconf/202430703001epjconf_eph2024_03001High Average Power High-Harmonic EUV Sources and High Performance Imaging at the NanoscaleLimpert Jens0Rothhardt Jan1Helmholtz Institute JenaHelmholtz Institute JenaWe will report about the development of fiber-laser-driven high harmonic sources with output power currently exceeding 10 mW. This exceptional performance, combined with structured illumination approaches, enables nanoscale imaging and mapping of the chemical composition of semiconductor- and biological samples at the nanoscale.https://www.epj-conferences.org/articles/epjconf/pdf/2024/17/epjconf_eph2024_03001.pdf |
| spellingShingle | Limpert Jens Rothhardt Jan High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale EPJ Web of Conferences |
| title | High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale |
| title_full | High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale |
| title_fullStr | High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale |
| title_full_unstemmed | High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale |
| title_short | High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale |
| title_sort | high average power high harmonic euv sources and high performance imaging at the nanoscale |
| url | https://www.epj-conferences.org/articles/epjconf/pdf/2024/17/epjconf_eph2024_03001.pdf |
| work_keys_str_mv | AT limpertjens highaveragepowerhighharmoniceuvsourcesandhighperformanceimagingatthenanoscale AT rothhardtjan highaveragepowerhighharmoniceuvsourcesandhighperformanceimagingatthenanoscale |