High Average Power High-Harmonic EUV Sources and High Performance Imaging at the Nanoscale

We will report about the development of fiber-laser-driven high harmonic sources with output power currently exceeding 10 mW. This exceptional performance, combined with structured illumination approaches, enables nanoscale imaging and mapping of the chemical composition of semiconductor- and biolog...

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Bibliographic Details
Main Authors: Limpert Jens, Rothhardt Jan
Format: Article
Language:English
Published: EDP Sciences 2024-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2024/17/epjconf_eph2024_03001.pdf
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Summary:We will report about the development of fiber-laser-driven high harmonic sources with output power currently exceeding 10 mW. This exceptional performance, combined with structured illumination approaches, enables nanoscale imaging and mapping of the chemical composition of semiconductor- and biological samples at the nanoscale.
ISSN:2100-014X