XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS
The paper presents an analysis of the results of a study into diamond-like carbon films synthesized by plasma-chemical deposition from hydrocarbon sources: methane (СН4) and ethane (С2Н6). Analysis of the spectra of X-ray photoelectron spectroscopy was employed to study the effect that the synthesis...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
North Caucasus Federal University
2022-05-01
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| Series: | Вестник Северо-Кавказского федерального университета |
| Subjects: | |
| Online Access: | https://vestnikskfu.elpub.ru/jour/article/view/1689 |
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