XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS

The paper presents an analysis of the results of a study into diamond-like carbon films synthesized by plasma-chemical deposition from hydrocarbon sources: methane (СН4) and ethane (С2Н6). Analysis of the spectra of X-ray photoelectron spectroscopy was employed to study the effect that the synthesis...

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Main Authors: Roman V. Pigulev, Konstantin I. Sidorov, Vitaliy A. Tarala, Sergey V. Lisitsyn, Elena N. Belyaeva, Maria V. Moskvicheva
Format: Article
Language:Russian
Published: North Caucasus Federal University 2022-05-01
Series:Вестник Северо-Кавказского федерального университета
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Online Access:https://vestnikskfu.elpub.ru/jour/article/view/1689
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author Roman V. Pigulev
Konstantin I. Sidorov
Vitaliy A. Tarala
Sergey V. Lisitsyn
Elena N. Belyaeva
Maria V. Moskvicheva
author_facet Roman V. Pigulev
Konstantin I. Sidorov
Vitaliy A. Tarala
Sergey V. Lisitsyn
Elena N. Belyaeva
Maria V. Moskvicheva
author_sort Roman V. Pigulev
collection DOAJ
description The paper presents an analysis of the results of a study into diamond-like carbon films synthesized by plasma-chemical deposition from hydrocarbon sources: methane (СН4) and ethane (С2Н6). Analysis of the spectra of X-ray photoelectron spectroscopy was employed to study the effect that the synthesis conditions have on the structure and composition of amorphous carbon films.
format Article
id doaj-art-05c85e45cd8741068bf542059a3c7bf6
institution DOAJ
issn 2307-907X
language Russian
publishDate 2022-05-01
publisher North Caucasus Federal University
record_format Article
series Вестник Северо-Кавказского федерального университета
spelling doaj-art-05c85e45cd8741068bf542059a3c7bf62025-08-20T02:54:07ZrusNorth Caucasus Federal UniversityВестник Северо-Кавказского федерального университета2307-907X2022-05-010529341687XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMSRoman V. Pigulev0Konstantin I. Sidorov1Vitaliy A. Tarala2Sergey V. Lisitsyn3Elena N. Belyaeva4Maria V. Moskvicheva5NCFUNCFUNCFUNCFUNCFUtechnology park «Skolkovo»The paper presents an analysis of the results of a study into diamond-like carbon films synthesized by plasma-chemical deposition from hydrocarbon sources: methane (СН4) and ethane (С2Н6). Analysis of the spectra of X-ray photoelectron spectroscopy was employed to study the effect that the synthesis conditions have on the structure and composition of amorphous carbon films.https://vestnikskfu.elpub.ru/jour/article/view/1689аморфный гидрогенезированный углеродспектры рентгеновские фотоэлек-тронныемикрокристаллическийнанокристаллическийультрананокристаллическийаморфныйamorphous hydrogenised carbonx-ray photoelectron spectramicrocrystallinenanocrystallineultra-nanocrystallineamorphous
spellingShingle Roman V. Pigulev
Konstantin I. Sidorov
Vitaliy A. Tarala
Sergey V. Lisitsyn
Elena N. Belyaeva
Maria V. Moskvicheva
XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS
Вестник Северо-Кавказского федерального университета
аморфный гидрогенезированный углерод
спектры рентгеновские фотоэлек-тронные
микрокристаллический
нанокристаллический
ультрананокристаллический
аморфный
amorphous hydrogenised carbon
x-ray photoelectron spectra
microcrystalline
nanocrystalline
ultra-nanocrystalline
amorphous
title XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS
title_full XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS
title_fullStr XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS
title_full_unstemmed XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS
title_short XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS
title_sort xps analysis of diamond like carbon films
topic аморфный гидрогенезированный углерод
спектры рентгеновские фотоэлек-тронные
микрокристаллический
нанокристаллический
ультрананокристаллический
аморфный
amorphous hydrogenised carbon
x-ray photoelectron spectra
microcrystalline
nanocrystalline
ultra-nanocrystalline
amorphous
url https://vestnikskfu.elpub.ru/jour/article/view/1689
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AT konstantinisidorov xpsanalysisofdiamondlikecarbonfilms
AT vitaliyatarala xpsanalysisofdiamondlikecarbonfilms
AT sergeyvlisitsyn xpsanalysisofdiamondlikecarbonfilms
AT elenanbelyaeva xpsanalysisofdiamondlikecarbonfilms
AT mariavmoskvicheva xpsanalysisofdiamondlikecarbonfilms