XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS
The paper presents an analysis of the results of a study into diamond-like carbon films synthesized by plasma-chemical deposition from hydrocarbon sources: methane (СН4) and ethane (С2Н6). Analysis of the spectra of X-ray photoelectron spectroscopy was employed to study the effect that the synthesis...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | Russian |
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North Caucasus Federal University
2022-05-01
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| Series: | Вестник Северо-Кавказского федерального университета |
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| Online Access: | https://vestnikskfu.elpub.ru/jour/article/view/1689 |
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| author | Roman V. Pigulev Konstantin I. Sidorov Vitaliy A. Tarala Sergey V. Lisitsyn Elena N. Belyaeva Maria V. Moskvicheva |
| author_facet | Roman V. Pigulev Konstantin I. Sidorov Vitaliy A. Tarala Sergey V. Lisitsyn Elena N. Belyaeva Maria V. Moskvicheva |
| author_sort | Roman V. Pigulev |
| collection | DOAJ |
| description | The paper presents an analysis of the results of a study into diamond-like carbon films synthesized by plasma-chemical deposition from hydrocarbon sources: methane (СН4) and ethane (С2Н6). Analysis of the spectra of X-ray photoelectron spectroscopy was employed to study the effect that the synthesis conditions have on the structure and composition of amorphous carbon films. |
| format | Article |
| id | doaj-art-05c85e45cd8741068bf542059a3c7bf6 |
| institution | DOAJ |
| issn | 2307-907X |
| language | Russian |
| publishDate | 2022-05-01 |
| publisher | North Caucasus Federal University |
| record_format | Article |
| series | Вестник Северо-Кавказского федерального университета |
| spelling | doaj-art-05c85e45cd8741068bf542059a3c7bf62025-08-20T02:54:07ZrusNorth Caucasus Federal UniversityВестник Северо-Кавказского федерального университета2307-907X2022-05-010529341687XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMSRoman V. Pigulev0Konstantin I. Sidorov1Vitaliy A. Tarala2Sergey V. Lisitsyn3Elena N. Belyaeva4Maria V. Moskvicheva5NCFUNCFUNCFUNCFUNCFUtechnology park «Skolkovo»The paper presents an analysis of the results of a study into diamond-like carbon films synthesized by plasma-chemical deposition from hydrocarbon sources: methane (СН4) and ethane (С2Н6). Analysis of the spectra of X-ray photoelectron spectroscopy was employed to study the effect that the synthesis conditions have on the structure and composition of amorphous carbon films.https://vestnikskfu.elpub.ru/jour/article/view/1689аморфный гидрогенезированный углеродспектры рентгеновские фотоэлек-тронныемикрокристаллическийнанокристаллическийультрананокристаллическийаморфныйamorphous hydrogenised carbonx-ray photoelectron spectramicrocrystallinenanocrystallineultra-nanocrystallineamorphous |
| spellingShingle | Roman V. Pigulev Konstantin I. Sidorov Vitaliy A. Tarala Sergey V. Lisitsyn Elena N. Belyaeva Maria V. Moskvicheva XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS Вестник Северо-Кавказского федерального университета аморфный гидрогенезированный углерод спектры рентгеновские фотоэлек-тронные микрокристаллический нанокристаллический ультрананокристаллический аморфный amorphous hydrogenised carbon x-ray photoelectron spectra microcrystalline nanocrystalline ultra-nanocrystalline amorphous |
| title | XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS |
| title_full | XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS |
| title_fullStr | XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS |
| title_full_unstemmed | XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS |
| title_short | XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS |
| title_sort | xps analysis of diamond like carbon films |
| topic | аморфный гидрогенезированный углерод спектры рентгеновские фотоэлек-тронные микрокристаллический нанокристаллический ультрананокристаллический аморфный amorphous hydrogenised carbon x-ray photoelectron spectra microcrystalline nanocrystalline ultra-nanocrystalline amorphous |
| url | https://vestnikskfu.elpub.ru/jour/article/view/1689 |
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