XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS

XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS

The paper presents an analysis of the results of a study into diamond-like carbon films synthesized by plasma-chemical deposition from hydrocarbon sources: methane (СН4) and ethane (С2Н6). Analysis of the spectra of X-ray photoelectron spectroscopy was employed to study the effect that the synthesis...

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Bibliographic Details
Main Authors: Roman V. Pigulev, Konstantin I. Sidorov, Vitaliy A. Tarala, Sergey V. Lisitsyn, Elena N. Belyaeva, Maria V. Moskvicheva
Format: Article
Language:Russian
Published: North Caucasus Federal University 2022-05-01
Series:Вестник Северо-Кавказского федерального университета
Subjects:
аморфный гидрогенезированный углерод
спектры рентгеновские фотоэлек-тронные
микрокристаллический
нанокристаллический
ультрананокристаллический
аморфный
amorphous hydrogenised carbon
x-ray photoelectron spectra
microcrystalline
nanocrystalline
ultra-nanocrystalline
amorphous
Online Access:https://vestnikskfu.elpub.ru/jour/article/view/1689
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Summary:The paper presents an analysis of the results of a study into diamond-like carbon films synthesized by plasma-chemical deposition from hydrocarbon sources: methane (СН4) and ethane (С2Н6). Analysis of the spectra of X-ray photoelectron spectroscopy was employed to study the effect that the synthesis conditions have on the structure and composition of amorphous carbon films.
ISSN:2307-907X

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