Design, Fabrication, and Characterization of a High Q Silica Nanobeam Cavity With Orthogonal Resonant Modes
We design and fabricate a high <inline-formula><tex-math notation="LaTeX">$Q$</tex-math></inline-formula> silica nanobeam cavity that supports both transverse electric (TE) and transverse magnetic modes in the 1.55  <inline-formula><tex-math nota...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2017-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8046146/ |
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| Summary: | We design and fabricate a high <inline-formula><tex-math notation="LaTeX">$Q$</tex-math></inline-formula> silica nanobeam cavity that supports both transverse electric (TE) and transverse magnetic modes in the 1.55  <inline-formula><tex-math notation="LaTeX">$\mathrm{\mu }$</tex-math></inline-formula>m wavelength range. The <inline-formula><tex-math notation="LaTeX">$Q$</tex-math></inline-formula> values obtained for both modes exceed <inline-formula><tex-math notation="LaTeX">$10^4$</tex-math></inline-formula> and are the highest reported values for photonic crystal (PhC) nanocavities made of silica. We also investigate the optimum conditions for coupling with the cavity in a side-coupled configuration. We achieve a coupling efficiency of 87% with the TE mode while maintaining a loaded <inline-formula><tex-math notation="LaTeX">$Q$</tex-math></inline-formula> of more than <inline-formula><tex-math notation="LaTeX">$10^4$</tex-math></inline-formula>. We also found that the presence of a coupled waveguide reduces the intrinsic <inline-formula><tex-math notation="LaTeX">$Q$</tex-math></inline-formula> of the cavity, depending on the gap distance. This provides useful quantitative information for establishing an efficient scheme for coupling with low-index PhC nanocavities. |
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| ISSN: | 1943-0655 |