Using Mono-, Bi- and Tri-Metallic Nanoparticles to Improve Selectivity and Sensitivity of CMOS-Integrated SnO<sub>2</sub> Thin-Film Gas Sensors

Using Mono-, Bi- and Tri-Metallic Nanoparticles to Improve Selectivity and Sensitivity of CMOS-Integrated SnO<sub>2</sub> Thin-Film Gas Sensors

We demonstrate the systematic optimization of SnO<sub>2</sub>-based thin-film chemical sensors by using mono-, bi- and tri metallic nanoparticles (NPs) composed of Ag, Pd, and Ru, which are deposited via magnetron sputtering inert gas condensation. The ultrathin SnO<sub>2</sub&g...

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Bibliographic Details
Main Authors: Florentyna Sosada-Ludwikowska, Larissa Egger, Jerome Vernieres, Vidyadhar Singh, Panagiotis Grammatikopoulos, Stephan Steinhauer, Anton Köck
Format: Article
Language:English
Published: MDPI AG 2024-06-01
Series:Proceedings
Subjects:
chemical sensors
multi-gas sensor
CMOS integration
metal oxides
nanoparticles
Online Access:https://www.mdpi.com/2504-3900/97/1/224
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