Using Mono-, Bi- and Tri-Metallic Nanoparticles to Improve Selectivity and Sensitivity of CMOS-Integrated SnO<sub>2</sub> Thin-Film Gas Sensors
We demonstrate the systematic optimization of SnO<sub>2</sub>-based thin-film chemical sensors by using mono-, bi- and tri metallic nanoparticles (NPs) composed of Ag, Pd, and Ru, which are deposited via magnetron sputtering inert gas condensation. The ultrathin SnO<sub>2</sub&g...
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MDPI AG
2024-06-01
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| author | Florentyna Sosada-Ludwikowska Larissa Egger Jerome Vernieres Vidyadhar Singh Panagiotis Grammatikopoulos Stephan Steinhauer Anton Köck |
| author_facet | Florentyna Sosada-Ludwikowska Larissa Egger Jerome Vernieres Vidyadhar Singh Panagiotis Grammatikopoulos Stephan Steinhauer Anton Köck |
| author_sort | Florentyna Sosada-Ludwikowska |
| collection | DOAJ |
| description | We demonstrate the systematic optimization of SnO<sub>2</sub>-based thin-film chemical sensors by using mono-, bi- and tri metallic nanoparticles (NPs) composed of Ag, Pd, and Ru, which are deposited via magnetron sputtering inert gas condensation. The ultrathin SnO<sub>2</sub> films are integrated on CMOS-based micro-hotplate devices, where each chip contains 16 sensor devices in total. We found that the response of the sensor device can be significantly tuned to specific target gases, such as CO and VOCs, by using various types of NPs. |
| format | Article |
| id | doaj-art-043cff7828e042f0b6dad6bd4bd48716 |
| institution | DOAJ |
| issn | 2504-3900 |
| language | English |
| publishDate | 2024-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Proceedings |
| spelling | doaj-art-043cff7828e042f0b6dad6bd4bd487162025-08-20T02:56:51ZengMDPI AGProceedings2504-39002024-06-0197122410.3390/proceedings2024097224Using Mono-, Bi- and Tri-Metallic Nanoparticles to Improve Selectivity and Sensitivity of CMOS-Integrated SnO<sub>2</sub> Thin-Film Gas SensorsFlorentyna Sosada-Ludwikowska0Larissa Egger1Jerome Vernieres2Vidyadhar Singh3Panagiotis Grammatikopoulos4Stephan Steinhauer5Anton Köck6Materials Center Leoben Forschung GmbH, 8700 Leoben, AustriaMaterials Center Leoben Forschung GmbH, 8700 Leoben, AustriaNanoparticles by Design Unit, Okinawa Institute of Science and Technology (OIST), Okinawa 904 0495, JapanDepartment of Physics, Jai Prakash University, Chapra 841301, Bihar, IndiaMaterials Sciences and Engineering GTIIT, Guangdong Technion—Israel Institute of Technology, Shantou 515063, ChinaQuantum Nano Photonics, Department of Applied Physics, KTH Royal Institute of Technology, 10044 Stockholm, SwedenMaterials Center Leoben Forschung GmbH, 8700 Leoben, AustriaWe demonstrate the systematic optimization of SnO<sub>2</sub>-based thin-film chemical sensors by using mono-, bi- and tri metallic nanoparticles (NPs) composed of Ag, Pd, and Ru, which are deposited via magnetron sputtering inert gas condensation. The ultrathin SnO<sub>2</sub> films are integrated on CMOS-based micro-hotplate devices, where each chip contains 16 sensor devices in total. We found that the response of the sensor device can be significantly tuned to specific target gases, such as CO and VOCs, by using various types of NPs.https://www.mdpi.com/2504-3900/97/1/224chemical sensorsmulti-gas sensorCMOS integrationmetal oxidesnanoparticles |
| spellingShingle | Florentyna Sosada-Ludwikowska Larissa Egger Jerome Vernieres Vidyadhar Singh Panagiotis Grammatikopoulos Stephan Steinhauer Anton Köck Using Mono-, Bi- and Tri-Metallic Nanoparticles to Improve Selectivity and Sensitivity of CMOS-Integrated SnO<sub>2</sub> Thin-Film Gas Sensors Proceedings chemical sensors multi-gas sensor CMOS integration metal oxides nanoparticles |
| title | Using Mono-, Bi- and Tri-Metallic Nanoparticles to Improve Selectivity and Sensitivity of CMOS-Integrated SnO<sub>2</sub> Thin-Film Gas Sensors |
| title_full | Using Mono-, Bi- and Tri-Metallic Nanoparticles to Improve Selectivity and Sensitivity of CMOS-Integrated SnO<sub>2</sub> Thin-Film Gas Sensors |
| title_fullStr | Using Mono-, Bi- and Tri-Metallic Nanoparticles to Improve Selectivity and Sensitivity of CMOS-Integrated SnO<sub>2</sub> Thin-Film Gas Sensors |
| title_full_unstemmed | Using Mono-, Bi- and Tri-Metallic Nanoparticles to Improve Selectivity and Sensitivity of CMOS-Integrated SnO<sub>2</sub> Thin-Film Gas Sensors |
| title_short | Using Mono-, Bi- and Tri-Metallic Nanoparticles to Improve Selectivity and Sensitivity of CMOS-Integrated SnO<sub>2</sub> Thin-Film Gas Sensors |
| title_sort | using mono bi and tri metallic nanoparticles to improve selectivity and sensitivity of cmos integrated sno sub 2 sub thin film gas sensors |
| topic | chemical sensors multi-gas sensor CMOS integration metal oxides nanoparticles |
| url | https://www.mdpi.com/2504-3900/97/1/224 |
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